In-Depth Practical Study of Length Metrology With Laser Interferometers Applying Different Techniques

International Journal of Applied Physics

© 2020 by SSRG - IJAP Journal

Volume 7 Issue 2

Year of Publication : 2020

Authors : Ihab H. Naeim

10.14445/23500301/IJAP-V7I2P106

How to Cite?

Ihab H. Naeim, "In-Depth Practical Study of Length Metrology With Laser Interferometers Applying Different Techniques," SSRG International Journal of Applied Physics, vol. 7,  no. 2, pp. 36-42, 2020. Crossref, https://doi.org/10.14445/23500301/IJAP-V7I2P106

Abstract:

The nanotechnology era or beyond always needs to develop and modernize methods of calibration and measurements considering the availability and benefit of applications. In this paper, I investigate two types of laser interferometers using two different techniques applying in Nano-metrology. In the tractability chain for Gauge Blocks length measurement, the PTBGermany and NIS-Egypt are considered from the elites of national metrology institutes. A Double-Ended Interferometer being established in PTB as a traceable tool for other GB length interferometer (Single-Ended Interferometer). 10 steel GBs ranging in nominal length from 1.4 mm to 10 mm were calibrated in two accredit national laboratories applying two interferometric techniques. An absolute agreement between the measurement results was achieved. Reducing the uncertainty budget in SEI by eliminating the wringing process was the primary goal in designing the doubleended interferometer DEI. A detailed study and important results in this goal were achieved.

Keywords:

Laser Interferometry, Double-ended interferometer, Phase correction, Uncertainty budget

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