Micro-Opto-Electro-Mechanical Transducers for Measurement and Control Systems

International Journal of Electrical and Electronics Engineering
© 2018 by SSRG - IJEEE Journal
Volume 5 Issue 10
Year of Publication : 2018
Authors : Pham Anh Tuan, Nguyen Van Thien, Nguyen Van Tho and Trinh Van Minh
How to Cite?

Pham Anh Tuan, Nguyen Van Thien, Nguyen Van Tho and Trinh Van Minh, "Micro-Opto-Electro-Mechanical Transducers for Measurement and Control Systems," SSRG International Journal of Electrical and Electronics Engineering, vol. 5,  no. 10, pp. 7-11, 2018. Crossref, https://doi.org/10.14445/23488379/IJEEE-V5I10P103


In this article operating principle and determination method of design parameters of micro-opto-electro-mechanical (MOEM) – transducers based on optical tunnelling effect (OTE), which is supported to its operating process within specified range of high sensitivity. Possibility of adjustable measurement range of those transducers by using feedback circuit is considered. Transducers of mechanical (pressure and acceleration) parameters with quasi-linear transfer function are developed.


Transducers, pressure, acceleration, high sensitivity, optical tunnelling effect, quasi-linear.


[1] Ghodssi R., Lin P. MEMS materials and processes handbook. Pub: Springer, USA, 2011. – 1188p. 
[2] Pham Anh Tuan, et al. Three-axis micro-opto-electro-mechanical angular velocity transducer based on the optical tunneling effect // Optoelectronics Instrumentation and Data Processing 2016, Vol 53, № 6, - p. 562-569. 
[3] Fraden J., Handbook of modern sensors. Physics designs and applications, 3rd edition, Springer-Verlag, New York, 2004, 579p. 
[4] Liu C. Foundations of MEMS, 2nd edition. Pub: Prentice Hall, USA, 2011. – 576p. 
[5] Born М., Wolf E. Osnovy optiki [Principles of optics]. Trans. from eng. М.: Moscow, 1983. 721p. 
[6] Busurin V. I., Gorshkov B. G, Korobkov V. V. Volokonno-opticheskie informasionano-izmericheniye systemy. - M .: MAI, 2012. - 168 p. 
[7] Ryder G. H. Strength of materials. - Third Edition in SI Units. 1969; 197. 
[8] Madhukar V., Mechanics of Material, second edition, Michigan Technilogical University, 2014, 578p. 
[9] Busurin V.I., Jeglov M.А., Korobkov V.V., Pham Anh Tuan. Patent in Russian Federation №2566384 «Mikroopto-elektromechnicheski dbuxosevoi datchik uglovoi skorosti i lineinogo uskoreniya» ot 27 oktyabrya 2015, B.I. № 30. 
[10] Min-Hang Bao. Handbook of sensors and actuators – 8: micro mechanical transducers pressure sensors, accelerometers and gyroscopes. Elsevier Press, 2000, – 392p. 
[11] Busurin V. I., Lwin N.T., Pham Anh Tuan. Investigation of micro-opto-eletro-mechanical angular velocity and acceleration transducers based on optical tunneling effect // Physics Procedia, vol. 73, 2015, 198 – 204p. 
[12] Busurin V. I., Pham Anh Tuan. Microopto–eletromechanical angular velocity based on optical tunneling effect // Avtometrya, 2016, T. 52, № 2, - p. 124 – 130. 
[13] Bose A., Bhat K. N., Banerjee P. Modern inertial sensors and systems. Pub: Prentice-Hall of India Pvt. Ltd, 2014. – 425p. 
[14] Udd E. Volokonno – opticheskie datchiki [Fiber-optical sensors]. Trans. from eng. – М.: Tekhnosphera, 2008. – 520p. 
[15] Busurin V. I, Kazaryan A. V, Pham Anh Tuan. Research of the characteristics microelectromechnical angular velocity transducer // Vesknik of the Moscow Aviation Institute, 2015, №1. - C. 29 - 37. 
[16] Pham Anh Tuan, et al. Methods of expanding the measurement range of micro-opto-electro-mechanical angular velocity transducer // Measurement techniques, Vol . 60, No. 6, September, 2017.