Micro-Opto-Electro-Mechanical Transducers for Measurement and Control Systems
|International Journal of Electrical and Electronics Engineering|
|© 2018 by SSRG - IJEEE Journal|
|Volume 5 Issue 10|
|Year of Publication : 2018|
|Authors : Pham Anh Tuan, Nguyen Van Thien, Nguyen Van Tho and Trinh Van Minh|
How to Cite?
Pham Anh Tuan, Nguyen Van Thien, Nguyen Van Tho and Trinh Van Minh, "Micro-Opto-Electro-Mechanical Transducers for Measurement and Control Systems," SSRG International Journal of Electrical and Electronics Engineering, vol. 5, no. 10, pp. 7-11, 2018. Crossref, https://doi.org/10.14445/23488379/IJEEE-V5I10P103
In this article operating principle and determination method of design parameters of micro-opto-electro-mechanical (MOEM) – transducers based on optical tunnelling effect (OTE), which is supported to its operating process within specified range of high sensitivity. Possibility of adjustable measurement range of those transducers by using feedback circuit is considered. Transducers of mechanical (pressure and acceleration) parameters with quasi-linear transfer function are developed.
Transducers, pressure, acceleration, high sensitivity, optical tunnelling effect, quasi-linear.
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