Piezoelectric-Based Square Diaphragm Pressure Sensor Modelling and Analysis using PZT-5H and PZT-5A
| International Journal of Electrical and Electronics Engineering |
| © 2023 by SSRG - IJEEE Journal |
| Volume 10 Issue 8 |
| Year of Publication : 2023 |
| Authors : Moirangthem Shamjit Singh, Pradip Kumar Kalita, Maibam Sanju Meetei |
10.14445/23488379/IJEEE-V10I8P101
How to Cite?
Moirangthem Shamjit Singh, Pradip Kumar Kalita, Maibam Sanju Meetei, "Piezoelectric-Based Square Diaphragm Pressure Sensor Modelling and Analysis using PZT-5H and PZT-5A," SSRG International Journal of Electrical and Electronics Engineering, vol. 10, no. 8, pp. 1-8, 2023. Crossref, https://doi.org/10.14445/23488379/IJEEE-V10I8P101
Abstract:
This study presents the analytical model and 3D model simulation of the piezoelectric square diaphragm pressure based on PZT-5H and PZT-5A. The sensor's pressure stress model and electrostatic model are explained in the analytical model of the sensor, and all the variables impacting the induced stress and output voltage are covered. Piezoelectric materials such as PZT-5A, PZT-5H and PZT-5J, PVDF, PMN-PT, LiNbO3, AlN, and ZnO are used to create pressure sensors. The COMSOL Multiphysics simulator simulates the suggested 3D sensor model to verify the analytical model. The validation of the analytical model using the simulated values revealed that the sensor's output characteristics are linear with applied pressure and have a negative slope. This study also identifies the negative voltage that forms when tensile stress occurs. The analytical and simulated values of the PZT-5H-based sensor's sensitivities are -5.879 mV/kPa and -6.279 mV/kPa, respectively. The analytical and simulated values for the PZT-5A-based sensor's sensitivities are -7.468 mV/kPa and -7.347 mV/kPa, respectively.
Keywords:
Equivalent circuit, Linear, Natural plane, Voltage coefficient, Sensitivity.
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